Nanofabrication

Our research in nanofabrication focuses on the precise manipulation of materials at the atomic and molecular levels. By employing cutting-edge techniques such as electron beam lithography, atomic layer deposition, and nanoimprint lithography, we can create intricate patterns and structures with unprecedented accuracy even down to the single atom level. These techniques allow us to fabricate components that are smaller, faster, and more efficient than ever before. 

Nanofabrication is a cornerstone of modern semiconductor technology, enabling the creation of devices and structures at the nanometer scale. The research is crucial for the advancement of various technologies, including micro- and nanoelectronics, photonics, energy conversion and quantum computing. We are dedicated to pushing the boundaries of nanofabrication to develop innovative solutions that address the corresponding challenges of the future.

At our institute, we are committed to advancing the field of nanofabrication through interdisciplinary collaboration and cutting-edge research. Our work not only contributes to the scientific community but also has a profound impact on industry and society. By training the next generation of scientists and engineers, we are ensuring that the innovations of today will lead to the technological breakthroughs of tomorrow.

The center for nanotechnology and nanomaterials

The Walter Schottky institute of the TUM operates the Center for Nanotechnologies and Nanomaterials (ZNN), as a shared nanofabrication facility. Students, researchers, and scholars from the greater scientific Munich area have access to state-of-the-art nanolithography and -analytic instruments for building and characterizing nanoscale electronic, optoelectronic, and photonic circuits. The nanofabrication methodologies include ebeam-, focused-ion-beam-, and helium-ion-lithography.